Topography & roughness

Confocal microscopy / interferometry

Our optical 3D profilometer allows for non-contact determination of the surface structure and roughness of products of all kinds. The versatile combination device enables interferometry (both phase shift and white light interferometry), confocal microscopy, and focus variation. In combination with the piezo drive for height adjustment and an active vibration damping stage, interferometry can achieve z-resolutions in the sub-nanometer range. Even very rough samples can be analyzed with confocal microscopy, and the shape of a rough sample, such as the thread shape of a dental implant, can be analyzed quickly and easily using focus variation. Thanks to the 1 m long column for the measuring head, even very large samples can be analyzed.

Scanning Electron Microscopy (SEM)

If the lateral resolution that can be achieved with optical systems is not sufficient, the topography can be determined using a Scanning Electron Microscope (SEM). Here, images are taken with two different viewing angles and the topography is determined semi-quantitatively. With SEM, lateral resolutions down to the deep nanometer range can be achieved.

ISO 21920-1
ISO 21920-2
ISO 21920-3
ISO 25178-2
ISO 25178-3

Roughness measurement in quality assurance
Comparison of different surface treatment processes
Topography of coatings

Analysis of edge rounding in cutting tools or electropolished parts
Shape changes of etched wafers
Your specific question

z-resolution: from 2 nm for confocal microscopy, 1 nm for white light interferometry and sub‑nm for phase shift interferometry.
xy-resolution: from 0.15 µm (with 100× objective). With SEM from a few nm.
Measuring range: The measuring range can be extended almost at will by stitching (joining several measuring ranges), ultimately limited by the measuring time and the travel of the table (114 × 75 mm)
Surface roughness: Determination of all possible surface roughness parameters thanks to professional evaluation software.
Roughness of profiles: A set of profiles can be extracted from the topographies and all possible roughness values can be determined from these profiles, not just roughness values.
Shapes: Based on the topography, for example, we can determine step heights, edge rounding or the flatness of small areas.

For which samples is the method suitable?

Suitable samples are solids, foils etc., from highly polished to very rough, with a reflectivity of 0.05 to 100 %.

Thanks to our 1 m long column for the measuring head, larger samples up to approx. 60 × 60 × 60 cm and weighing up to 10 kg can also be examined. The maximum height difference that can be imaged is 37 mm.