Skip to content
METHODS

Scanning Electron Microscopy with Energy Dispersive X-ray spectroscopy (SEM / EDX)

Scanning Electron Microscopy (SEM) and Energy Dispersive X-ray spectroscopy (EDX) in combination offer a wide range of possibilities for the analysis and characterization of materials. They are ideal for determining the topography and structure of surfaces and fracture surfaces, with a magnification of up to 300,000×. We also have the option of analyzing samples at higher pressures, which allows us to analyze delicate, non-conductive samples without prior coating.

EDX spectroscopy offers the possibility to combine the SEM images with a determination of the elmentary composition and thus to visualize the chemical composition. Another example is particle analysis, in which the shape and composition of each individual particle can be determined.

According to which standards do we test?

Whenever possible, we carry out our testing services in accordance with or based on international standards, e.g:

  • ISO 17853
  • ASTM F1877

However, we will also be happy to find a solution for your specific problem.

Which devices do we use?

  • Zeiss Sigma 300 VP
  • UltimMax 40 EDX detector

What you should know about this method?

For which samples is the method suitable?

We can analyze all vacuum-resistant, metallic and non-metallic solids (e.g. polymers, ceramics) and powders.

The VP mode (reduced vacuum) allows the analysis of non-conductive samples without sputtering or metallization.

What do I need to bear in mind with the samples?
  • The maximum sample size (W × D × H): is 100 × 100 × 50 mm, larger samples are also possible in special cases.
  • Only a few particles are needed for powder samples.
  • Samples are best packed in e.g. clean aluminum foil or a clean container.
What is the measuring range?

Magnifications from 5× up to 300,000× are possible.

EDX allows for quantification of most elements with a detection limit of approx. 0.4 ‑ 0.5 % for elements lighter than Al and 0.2 ‑ 0.3 % for those heavier than Al. The lateral resolution and the depth of information are approx. 1 μm each.

I would like to be there when you watch my samples in the REM. Is that possible?

Yes, you are welcome to be present during the SEM investigations. This facilitates communication and allows for situational responses to the investigation results, which often has a positive impact on the quality of the results.

Is the method accredited?

Yes, SEM / EDX analyses are accredited according to ISO/IEC 17025.

Roman_Heuberger_1850x1233

Who is your contact person?

Roman Heuberger
Dr. sc. ETH Zurich, Certified Materials Engineer ETH
Head of Materials Testing and Consulting
+41 32 644 2022